Modeling and simulation development of electron beam resist based on cellular automata.
Ling LiShibing LongCongshun WangWengang WuYilong HaoMing LiuPublished in: Microelectron. J. (2006)
Keyphrases
- cellular automata
- electron beam
- cellular automaton model
- cellular automaton
- pedestrian dynamics
- cellular automata model
- integrated circuit
- x ray
- lattice gas
- design parameters
- chaotic dynamics
- semiconductor devices
- case study
- simulation model
- artificial intelligence
- discrete dynamical systems
- electron beam lithography
- potts model