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Characterization of polymeric thin films from isopropanol by PECVD.

Jesús Oziel Martínez-GutiérrezOscar García-SerranoGabriel Romero-ParedesRamon Peña-SierraAlejandro Ávila-García
Published in: CCE (2010)
Keyphrases
  • thin film
  • chemical vapor deposition
  • high density
  • grain size
  • multi layer
  • short circuit
  • room temperature
  • database
  • three dimensional
  • viewpoint