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Transistor Reliability Characterization for Advanced DRAM with HK+MG & EUV process technology.

N.-H. LeeS. LeeS.-H. KimG.-J. KimK. W. LeeY. S. LeeY. C. HwangH. S. KimS. Pae
Published in: IRPS (2022)
Keyphrases
  • high speed
  • design process
  • main memory
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  • key technologies
  • process management