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Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges.

Fen ChenCarole GraasMichael A. ShinoskyKai ZhaoShreesh NarasimhaXiao Hu LiuChunyan Tian
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • data generation
  • data streams
  • object recognition
  • active learning
  • least squares
  • leakage current
  • decision trees
  • low cost