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X-ray lithography beamlines in the IBM Advanced Lithography Facility.

Jerome P. SilvermanRobert P. RippsteinJames M. Oberschmidt
Published in: IBM J. Res. Dev. (1993)
Keyphrases
  • electron beam lithography
  • x ray
  • electron beam
  • x ray images
  • intraoperative
  • medical imaging
  • three dimensional
  • digital x ray images
  • projection images
  • tomographic images
  • ct scans
  • electron microscopy