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Electrical property dependence on thickness and morphology of nanocrystalline diamond thin films.
T. Izák
Marian Vojs
Marián Veselý
Jaroslava Skriniarová
I. Novotný
M. Michalka
R. Redhammer
Published in:
Microelectron. J. (2009)
Keyphrases
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thin film
film thickness
short circuit
electrical properties
grain size
multi layer
high density
transmission line
databases
structuring elements
solar cell
genetic algorithm
low power
room temperature
engineering and computer science