Classifying defects in topography images of silicon wafers.
Corinna KoflerGunter SpöckRobert MuhrPublished in: WSC (2017)
Keyphrases
- image database
- image data
- three dimensional
- object recognition
- ground truth
- image registration
- image analysis
- input image
- multiple images
- image features
- visual inspection
- image collections
- satellite images
- test images
- image classification
- transmission electron microscopy
- image processing algorithms
- high resolution images
- image matching
- edge detection
- region of interest
- low cost
- rigid body
- integrated circuit
- segmentation algorithm
- image set
- lighting conditions
- segmentation method
- image restoration
- natural images
- feature points
- markov random field
- high speed
- similarity measure