Impact of process variability on BEOL TDDB lifetime model assessment.

Kris Croes Deniz Kocaay Ivan Ciofi Jürgen Bömmels Zsolt Tokei

Published in: IRPS (2015)

Keyphrases

probabilistic model
process model
formal model
theoretical analysis
computational model
mathematical model
metamodel
analytical model
conceptual model
experimental data
database
parameter estimation
autoregressive
level set
probability distribution
cost function
expert systems
similarity measure
case study