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Impact of via geometry and line extension on via-electromigration in nano-interconnects.

A. S. SalehHouman ZahedmaneshHajdin CericIngrid De WolfKris Croes
Published in: IRPS (2023)
Keyphrases
  • input output
  • three dimensional
  • viewpoint
  • real time
  • artificial intelligence
  • video sequences
  • line segments
  • fiber optic
  • nano scale