The detection of empty resist bottles or air in the resist lines of a photolithography coating tool.
Terence SweeneyKevin CurranPublished in: Int. J. Comput. Integr. Manuf. (2015)
Keyphrases
- electron beam
- data sets
- line detection
- event detection
- detection method
- automatic detection
- detection algorithm
- false positives
- tool wear
- integrated circuit
- change detection
- line segments
- object detection
- expert systems
- website
- complex systems
- anomaly detection
- line drawings
- false alarms
- quality control
- detection accuracy
- man made
- detection scheme
- learning algorithm
- data mining
- database