Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control.
Yunbo HeXiquan MaiChengqiang CuiJian GaoZhijun YangKai ZhangXun ChenYun ChenHui TangPublished in: IEEE Access (2019)
Keyphrases
- experimental verification
- control loop
- control system
- discrete event simulation
- matlab simulink
- semiconductor manufacturing
- robot control
- robot manipulators
- robotic systems
- mobile robot
- robotic arm
- discrete event
- robot teams
- motion control
- robot behavior
- changing environment
- autonomous robots
- real robot
- hand eye
- experimental platform
- dynamic characteristics
- simulated robot
- visual servoing
- control strategy
- home environment
- degrees of freedom
- path planning
- pid control
- dynamic environments
- control algorithm
- mathematical model
- fuzzy control
- control scheme
- process control
- adaptive control
- human robot interaction
- input output
- swarm robots
- semi autonomous
- humanoid robot
- sliding mode control
- control signals
- sensory motor
- simulation model
- real time
- control architecture
- pid controller