Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices.
Wesley D. SacherJared C. MikkelsenYing HuangJason C. C. MakZheng YongXianshu LuoYu LiPatrick DumaisJia JiangDominic J. GoodwillEric BernierPatrick Guo-Qiang LoJoyce K. S. PoonPublished in: Proc. IEEE (2018)
Keyphrases
- waveguide
- silicon nitride
- silicon dioxide
- high speed
- thin film
- high data rate
- mobile devices
- electrical properties
- mobile platforms
- low cost
- logic circuits
- cmos technology
- semiconductor devices
- electro optic
- asynchronous circuits
- physical characteristics
- computing platform
- wireless sensor networks
- computational complexity