Surface micromachined RF MEMS variable capacitor.

Dong-Ming Fang Shi Fu Ying Cao Yong Zhou Xiao-Lin Zhao

Published in: Microelectron. J. (2007)

Keyphrases

three dimensional
surface reconstruction
surface fitting
relevance feedback
d objects
free form
low frequency
radio frequency
object surface
surface features
surface geometry
power supply
surface patches
transmission line
thin film
range data
multiresolution