Sign in
An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage.
Min Li
Yu Zhu
Kaiming Yang
Chuxiong Hu
Haihua Mu
Published in:
IEEE Trans. Ind. Electron. (2017)
Keyphrases
</>
control strategy
mathematical model
feed forward
experimental data
control system
control algorithm
control law
neural network model
simulation model
neural nets
biologically inspired
control method
control strategies