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A feed-back control approach for global simulation of high density plasma discharges.
Deuk-Chul Kwon
Mi-Young Song
Jung-Sik Yoon
Nam-Sik Yoon
Published in:
Comput. Phys. Commun. (2013)
Keyphrases
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high density
low density
high power
close proximity
thin film
data center
high bandwidth
magnetic recording
control method
control system
chemical vapor deposition
simulation model
discrete event
optimal control
magnetic tape
multi layer
database
plasma etching
databases