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A study on flare minimisation in EUV lithography by post-layout re-allocation of wire segments.
Sudipta Paul
Pritha Banerjee
Susmita Sur-Kolay
Published in:
IET Circuits Devices Syst. (2021)
Keyphrases
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user interface
experimental study
information retrieval
learning algorithm
information systems
theoretical framework
study proposes
equal length