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Fabrication and characterization of integrated photonics structures on GaN-Based photonic crystal membranes grown on silicon.
Romuald Houdré
N. Vico Triviño
U. Dharanipathy
M. S. Mohamed
Jean-Francois Carlin
Nicolas Grandjean
Published in:
ICTON (2015)
Keyphrases
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high density
high speed
field effect transistors
semiconductor devices
low cost
plasma etching
real world
information retrieval
genetic algorithm
information systems
gray level
data center
integrated circuit
structural features
electron microscopy