Fabrication of ZnO thin film sensor for MIS flexible force feedback device.
Shih-Chi ChanDavid T. W. LinKai-Che LiuJing-Jim OuAshwin VermaPublished in: NEMS (2016)
Keyphrases
- thin film
- force feedback
- high density
- plasma etching
- contact force
- virtual reality
- robot assisted
- chemical vapor deposition
- visual feedback
- sensor networks
- multi layer
- liquid crystal displays
- end effector
- solar cell
- real time
- virtual space
- robot arm
- robotic arm
- data center
- virtual environment
- vision system
- human operators