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IC laser trimming speed-up through wafer-level spatial correlation modeling.
Constantinos Xanthopoulos
Ke Huang
Abbas Poonawala
Amit Nahar
Bob Orr
John M. Carulli Jr.
Yiorgos Makris
Published in:
ITC (2014)
Keyphrases
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spatial correlation
integrated circuit
temporal correlation
massively parallel
database
case study
infrared
modeling framework
semiconductor manufacturing