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Impact of fabrication non-uniformity on chip-scale silicon photonic integrated circuits.
Lukas Chrostowski
X. Wang
Jonas Flueckiger
Yichen Wu
Y. Wang
Sahba Talebi Fard
Published in:
OFC (2014)
Keyphrases
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integrated circuit
metal oxide semiconductor
high density
high speed
printed circuit boards
electron beam
low cost
semiconductor devices
silicon on insulator
built in self test
scale space
real time
circuit design
low density
vlsi implementation
low power
multiscale