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Selective growth experiments on gallium arsenide (100) surfaces patterned using UV-nanoimprint lithography.

Antti TukiainenJ. ViheriäläTapio NiemiT. RytkönenJ. KontioM. Pessa
Published in: Microelectron. J. (2006)
Keyphrases
  • gallium arsenide
  • free form
  • back propagation
  • range data
  • surface reconstruction
  • electron beam
  • growth model
  • data sets
  • object recognition
  • curved surfaces