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Manufacturability-aware mask assignment in multiple patterning lithography.
Yukihide Kohira
Atsushi Takahashi
Tomomi Matsui
Chikaaki Kodama
Shigeki Nojima
Satoshi Tanaka
Published in:
APCCAS (2016)
Keyphrases
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information retrieval
knowledge base
neural network
case study
three dimensional
cooperative
computer science
control system
management system
electron beam