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Manufacturability-aware mask assignment in multiple patterning lithography.

Yukihide KohiraAtsushi TakahashiTomomi MatsuiChikaaki KodamaShigeki NojimaSatoshi Tanaka
Published in: APCCAS (2016)
Keyphrases
  • information retrieval
  • knowledge base
  • neural network
  • case study
  • three dimensional
  • cooperative
  • computer science
  • control system
  • management system
  • electron beam