Plasma Etching Using Expanded Hidden Markov Model.
Sung-Ik JeonSeung-Gyun KimSang Jeen HongSeung Soo HanPublished in: ISNN (2) (2010)
Keyphrases
- hidden markov models
- plasma etching
- low density
- thin film
- high density
- speech recognition
- hidden states
- conditional random fields
- markov models
- sequential data
- gesture recognition
- viterbi algorithm
- handwritten word recognition
- forward backward
- baum welch
- continuous hidden markov models
- dynamic probabilistic networks
- reinforcement learning
- multi stream
- discriminative training
- hidden state
- markov model