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Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment.
Byungwhan Kim
Jeong Kim
Seongjin Choi
Published in:
Expert Syst. Appl. (2009)
Keyphrases
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x ray
neural network
image data
medical imaging
intraoperative
tomographic images
electron microscopy
three dimensional
x ray images
similarity measure
raw data
digital x ray images
transmission electron microscopy
cone beam
computer assisted
distortion correction
prior information
remote sensing
image segmentation