Defect detection in patterned wafers using anisotropic kernels.
Maria ZontakIsrael CohenPublished in: Mach. Vis. Appl. (2010)
Keyphrases
- defect detection
- feature extraction
- integrated circuit
- multiple kernel learning
- kernel function
- diffusion processes
- kernel methods
- diffusion equation
- automated visual inspection
- matrix valued
- feature space
- linear combination
- diffusion process
- textured surfaces
- semiconductor manufacturing
- gaussian kernel
- anisotropic diffusion
- support vector
- electron beam
- image processing
- diffusion filtering
- reproducing kernel hilbert space
- heat diffusion
- kernel learning
- data sets
- feature selection