Epitaxial Electro-optical Thin Film and Waveguide on SiO2/Si Substrate.
Futa UemuraJiawei MaoShiyoshi YokoyamaPublished in: OECC/PSC (2022)
Keyphrases
- thin film
- film thickness
- electro optical
- waveguide
- solar cell
- chemical vapor deposition
- infrared
- satellite imagery
- high density
- plasma etching
- physical phenomena
- short circuit
- multi layer
- white light interferometry
- room temperature
- dielectric constant
- neural network
- spatial resolution
- experimental data
- remote sensing
- artificial neural networks