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Raman spectroscopic assessments of structural orientation and residual stress in wurtzitic AlN film deposited on (0 0 1) Si.
Wenliang Zhu
Giuseppe Pezzotti
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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permalloy films
structural information
electron microscopy
chemical vapor deposition
neural network
structural features
multi component
film thickness
transmission line
structural models
three dimensional
structural analysis
aspect ratio