A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems.
Adrián M. AguirreCarlos A. MéndezPedro M. CastroPublished in: Comput. Chem. Eng. (2011)
Keyphrases
- optimization method
- manufacturing systems
- flexible manufacturing systems
- manufacturing process
- shop floor
- manufacturing environment
- manufacturing cell
- assembly line
- optimization algorithm
- genetic algorithm
- optimization methods
- optimization process
- simulated annealing
- evolutionary algorithm
- petri net
- differential evolution
- manufacturing processes
- optimization procedure
- particle swarm
- quality control
- global optimum
- nonlinear optimization
- wafer fabrication
- metaheuristic
- nelder mead simplex
- complex systems
- production scheduling
- material handling
- computer aided
- quasi newton
- scheduling problem
- hybrid algorithm
- job shop
- multi objective
- holonic manufacturing systems
- processing times
- search space
- search algorithm