Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors.
Xiaofeng ZhaoChenchen JinQi DengMeiwei LvDianzhong WenPublished in: Sensors (2018)
Keyphrases
- magnetic field
- high density
- cmos technology
- integrated circuit
- metal oxide semiconductor
- electromagnetic fields
- silicon on insulator
- eddy current
- field effect transistors
- semiconductor devices
- high speed
- working principle
- low power
- resonant frequency
- thin film
- permanent magnet
- solar cell
- plasma etching
- equivalent circuit
- space charge
- electron beam
- transmission line
- power consumption
- magneto optic
- phase transition
- data center