Machine learning (ML)-based lithography optimizations.
Seongbo ShimSuhyeong ChoiYoungsoo ShinPublished in: APCCAS (2016)
Keyphrases
- machine learning
- maximum likelihood
- machine learning methods
- decision trees
- explanation based learning
- learning systems
- machine learning algorithms
- pattern recognition
- data analysis
- data sets
- natural language processing
- support vector machine
- electron beam
- machine learning approaches
- feature selection
- computer vision
- artificial intelligence
- knowledge discovery
- probabilistic model
- computer science
- multiscale
- knowledge acquisition
- em algorithm
- social networks
- data mining
- machine learning and data mining
- supervised machine learning
- database