Multi-axis Active Vibration Suppression for Wafer Transfer Systems.

Jiajie Qiu Hongjin Kim Fangzhou Xia Kamal Youcef-Toumi

Published in: AIM (2023)

Keyphrases

active control
expert systems
management system
information retrieval
intelligent systems
real time
data sets
computer vision
feature selection
case study
bayesian networks
distributed systems
computer systems
building blocks
fault diagnosis