Micromachined silicon accelerometers and gyroscopes.

Khalil Najafi Junseok Chae Haluk Kulah Guohong He

Published in: IROS (2003)

Keyphrases

inertial sensors
low cost
fall detection
high density
position and orientation
high speed
sensor fusion
gallium arsenide
silicon dioxide
physical activity
signature verification
neural network
cmos technology
fuzzy inference
motion tracking
frequency domain
space charge
silicon on insulator
real time