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Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

Thomas ChiarellaLiesbeth WittersAbdelkarim MerchaChristoph KernerRok DittrichMichal RakowskiClaude OrtollandLars-Åke RagnarssonBertrand ParvaisA. De KeersgieterS. KubicekA. RedolfiR. RooyackersC. VranckenS. BrusA. LauwersPhilippe AbsilS. BiesemansThomas Y. Hoffmann
Published in: ESSCIRC (2009)
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