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Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control.

Ashenafi Abrham KassaBijan ShirinzadehKim Sang TranKai Zhong LaiYanling TianYanding QinHuaxian Wei
Published in: Sensors (2024)
Keyphrases
  • disturbance rejection
  • control system
  • closed loop
  • pid controller
  • range data
  • control method
  • control loop
  • real time
  • data acquisition
  • neural network
  • artificial intelligence
  • control law