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A cost-effective wafer-level reliability test system for integrated circuit makers.

Summer Fan-Chung TsengWei-Ting Kary ChienExcimer GongBing-Chu Cai
Published in: IEEE Trans. Instrum. Meas. (2003)
Keyphrases
  • cost effective
  • integrated circuit
  • cost effectiveness
  • low cost
  • built in self test
  • data center
  • electron beam
  • environmentally friendly