Integrated CNTs thin film for MEMS mechanical sensors.

Van Thanh Dau Takeo Yamada Dzung Viet Dao Bui Thanh Tung Kenji Hata Susumu Sugiyama

Published in: Microelectron. J. (2010)

Keyphrases

thin film
high density
solar cell
data fusion
short circuit
sensor networks
sensor data
grain size
data analysis
chance discovery
electron microscopy
multi layer
real time
low cost
force sensing
white light interferometry
multi sensor
cost effective
multi view
high resolution
data mining
databases