A Deep Fuzzy Semi-supervised Approach to Clustering and Fault Diagnosis of Partially Labeled Semiconductor Manufacturing Data.
Joseph CohenJun NiPublished in: NAFIPS (2021)
Keyphrases
- fault diagnosis
- semi supervised
- partially labeled
- neural network
- fuzzy logic
- clustering analysis
- training data
- expert systems
- data points
- knowledge discovery
- labeled data
- data objects
- background knowledge
- data sets
- prior knowledge
- data analysis
- unsupervised learning
- fuzzy sets
- semi supervised learning
- unlabeled data
- active learning
- data fusion
- distance metric
- production system
- fuzzy clustering
- fault detection
- similarity measure
- semiconductor manufacturing
- learning algorithm
- fully labeled