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Epitaxial lateral overgrowth of InP/GaAs (100) heterostructures by metalorganic chemical vapor deposition.

Deping XiongXiaomin RenQi WangAiguang RenJing ZhouJihe LvShiwei CaiHui HuangYongqing Huang
Published in: Microelectron. J. (2007)
Keyphrases
  • chemical vapor deposition
  • thin film
  • room temperature
  • high density
  • field effect transistors
  • gallium arsenide
  • injection lasers
  • three dimensional
  • databases
  • machine learning
  • multiscale
  • low cost