Capacitive Measurements of SiO2 Films of Different Thicknesses Using a MOSFET-Based SPM Probe.

Hoontaek Lee Kumjae Shin Wonkyu Moon

Published in: Sensors (2021)

Keyphrases

electrical properties
silicon dioxide
metal oxide
film thickness
fundamental limits
measurement noise
space charge
thin film
data sets
neural network
information systems
text classification
bag of words
bag of features
noisy measurements
film restoration