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Reliability studies of barrier layers for Cu/PAE low-k interconnects.

Hung Son NguyenZ. H. GanZhe ChenV. ChandrasekarK. PrasadS. G. MhaisalkarNing Jiang
Published in: Microelectron. Reliab. (2006)
Keyphrases
  • genetic algorithm
  • neural network
  • multi layer
  • input output
  • data sets
  • empirical studies
  • high speed
  • real time
  • high levels
  • highly reliable
  • reliability analysis