Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model.
Rui ZhangHongbin ShiYuehong DaiJong Tae ParkToshitsugu UedaPublished in: Microelectron. Reliab. (2012)
Keyphrases
- finite element model
- boundary element
- response surface
- experimental data
- finite element
- boundary conditions
- finite element analysis
- optimization methods
- mechanical properties
- numerical simulations
- measured data
- global optimization
- high density
- optimization algorithm
- finite element methods
- optimization method
- stress response
- material properties
- expert systems
- finite element method
- optimization problems
- deformable object tracking
- optimization scheme