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State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage.
Min Li
Kaiming Yang
Yu Zhu
Haihua Mu
Chuxiong Hu
Published in:
IEEE Trans. Ind. Electron. (2017)
Keyphrases
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model free
sliding mode control
reinforcement learning
adaptive fuzzy
sliding surface
real time
state space
function approximation
adaptive neural
image processing
least squares
denoising