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Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor.
Anthony Dickherber
Christopher D. Corso
William Hunt
Published in:
EMBC (2006)
Keyphrases
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thin film
film thickness
underwater vehicles
source localization
waveguide
grain size
high density
bird species
database
neural network
data mining
machine learning
electron microscopy
wave equation