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Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor.

Anthony DickherberChristopher D. CorsoWilliam Hunt
Published in: EMBC (2006)
Keyphrases
  • thin film
  • film thickness
  • underwater vehicles
  • source localization
  • waveguide
  • grain size
  • high density
  • bird species
  • database
  • neural network
  • data mining
  • machine learning
  • electron microscopy
  • wave equation