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thin films in hydrogen atmosphere at temperatures between 150 and 250 degreeC.
Emil V. Jelenkovic
K. Y. Tong
Wai Yuen Cheung
S. P. Wong
Published in:
Microelectron. Reliab. (2003)
Keyphrases
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thin film
chemical vapor deposition
high density
thermal conductivity
room temperature
short circuit
steady state
white light interferometry
solar cell
multi layer
carbon dioxide
viewpoint
electric field
grain size
space charge
wireless sensor networks
genetic algorithm
machine learning