Semiconductor Wafer Surface: Automatic Defect Classification with Deep CNN.
Charissa PhuaLau Bee ThengPublished in: TENCON (2020)
Keyphrases
- defect classification
- semiconductor manufacturing
- semi automatic
- cellular neural networks
- three dimensional
- wafer fabrication
- surface reconstruction
- gallium arsenide
- massively parallel
- real time
- data driven
- image segmentation
- point cloud
- fully automatic
- process control
- object surface
- free form
- multi view
- surface geometry
- d objects
- optical flow