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Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment.
Philip Tchatchoua
Guillaume Graton
Mustapha Ouladsine
Jean-François Christaud
Published in:
Sensors (2023)
Keyphrases
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fault detection
semiconductor manufacturing
fault diagnosis
industrial processes
rotating machinery
neural network
process control
fault detection and diagnosis
fuel cell
real time
artificial intelligence
expert systems