Three-Dimensionally Assembled TES X-ray Microcalorimeter Arrays for a TEM EDS System.
Kenichiro NagayoshiKazuhiro SakaiKazuhisa MitsudaNoriko Y. YamasakiYoh TakeiKeisuke MaehataNaoko IyomotoShohei EzakiAkira TakanoMakoto MaedaToru HaraPublished in: IEICE Trans. Electron. (2015)