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Failure analysis on 14 nm FinFET devices with ESD CDM failure.
Shaalini Chithambaram
Pik Kee Tan
Yuzhe Zhao
Binghai Liu
Yinzhe Ma
Alfred Quah
Dayanand Nagalingam
Yanlin Pan
Zhihong Mai
Published in:
Microelectron. Reliab. (2018)
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