Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes.
Gian Antonio SustoAdrian B. JohnstonPaul G. O'HaraSeán F. McLoonePublished in: CASE (2013)
Keyphrases
- multistage
- early stage
- process control
- single stage
- stochastic programming
- prediction accuracy
- production system
- dynamic programming
- stochastic optimization
- control system
- production line
- optimal policy
- camera calibration
- virtual world
- augmented reality
- lot sizing
- attack detection
- finite horizon
- lot streaming
- high density
- optimal control
- sentiment analysis
- production planning
- single view
- virtual reality
- sufficient conditions
- assembly systems
- decision making