Vibration suppression of a state-of-the-art wafer gripper.
M. El AjjajMarcin B. KaczmarekM. A. C. C. van den HurkS. Hassan HosseinNiaPublished in: CoRR (2022)
Keyphrases
- semiconductor manufacturing
- integrated circuit
- robotic arm
- robotic cell
- edge detection
- hand eye calibration
- massively parallel
- dynamic response
- fault diagnosis
- position and orientation
- visual feedback
- decision trees
- manufacturing systems
- data sets
- manufacturing process
- user interface
- case study
- vision sensor
- wafer fabrication
- databases